Jul 21, 2020 논문 읽기 03: 'Structural, Optical and Electrical Properties of HfO2 Thin Films Deposited at Low-Temperature Using Plasma-Enhanced Atomic Layer Deposition', Materials (2020), 13, 2008 Jun 08, 2020 논문 읽기 02-B: 'New development of Atomic Layer Deposition: Processes, Methods and Applications', Sci. Technol. Adv. Mater., 20, (2019), 66 May 29, 2020 논문 읽기 02-A: 'New development of Atomic Layer Deposition: Processes, Methods and Applications', Sci. Technol. Adv. Mater., 20, (2019), 66 Oct 25, 2019 논문 읽기 01: 'Atomic layer deposition: An overview', Chem. Rev. (2010), 110, 111-131