A tiny step

Blogging for exploring fun things

특허 읽기: '원자층 증착 장치 및 이를 이용한 박막 형성 방법' (10-2019-0002987)

201123 `Apparatus for Atomic Layer Deposition and Method for Forming Thin Film using the Same` patent review

10 min read · November 23, 2020

2020 · Chemical Engineering SEC Samsung Electronics Co., LTD. ALD Atomic Layer Deposition CVD Chemical Vapor Deposition Semiconductor Patent Study Note · blog
특허 읽기: '반도체 소자의 제조방법' (10-2168443)

201023 `Method of Manufacturing Semiconductor Device` patent review

8 min read · October 23, 2020

2020 · Chemical Engineering Wonik IPS Plasma Semiconductor Device Patent Study Note · blog
특허 읽기: '플라즈마 처리 장치, 그의 플라즈마 처리 방법, 및 플라즈마 식각 방법' (10-2015-0185181)

201015 `Apparatus for Processing Plasma and Plasma Processing Method, Plasma Etching Method of the Same` patent review

15 min read · October 15, 2020

2020 · Chemistry Chemical Engineering SEC Plasma Etching Semiconductor Patent Study Note · blog
특허 읽기: '다중 패터닝 프로세스에서 원자층 증착을 사용한 스페이서 프로파일 제어' (10-2020-0105531)

201007 `Spacer Profile Control Using Atomic Layer Deposition in a Multiple Patterning Process` patent review

11 min read · October 07, 2020

2020 · Chemistry Chemical Engineering Lam Research Atomic Layer Deposition ALD Thin Film Deposition Semiconductor Patent Study Note · blog
macOS 다시 설치하고 설정하기 01

200907 `macOS setting AtoZ for me`

8 min read · September 07, 2020

2020 · Python Mac Programming Study Note · blog